Effect of nitrogen (N2) flow rate over the tribological, structural and mechanical properties diamond-like carbon (DLC) thin film

Ranjan Kr Ghadai,Soham Das,Kanak Kalita,Ishwer Shivakoti,Subhas Ch Mondal,Bibhu P. Swain
DOI: https://doi.org/10.1016/j.matchemphys.2020.124082
IF: 4.778
2021-02-01
Materials Chemistry and Physics
Abstract:In this article, nitrogen (N2) doped diamond-like carbon (N-DLC) coatings are deposited by Atmospheric pressure chemical vapor deposition (APCVD) technique at varying N2 flow rates and are investigated by scanning electron microscopy (SEM), atomic force microscopy (AFM), Raman spectroscopy, nanoindentation (NI) and nano scratch (NS) characterization. The wear rate (WR) and coefficient of friction (μ) of the N-DLC thin films increase from 1.32 x 10-4 to 3.11 x 10-4 μm2 and 0.05 to 0.15 with the increase of load from 40 to 70 mN at 70 sccm N2 flow rate. The results showed that there is a significant improvement in the tribological and mechanical properties of the APCVD synthesized DLC film as compare to the other PVD deposited DLC film.
materials science, multidisciplinary
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