Active-layer thickness effects on the on-state current and threshold voltage of ZnO TFT

Chengyuan Dong,Yikai Su,Junfeng Li,Bo Jin
2009-01-01
Abstract:We study the factors that contribute to the changes of on-state current and threshold voltage of ZnO TFT when varying the thickness of the active layer. We build a simple model to describe the layer-thickness effects and perform two sets of simulations by varying one parameter at a time. The results show that the changes of on-state current and threshold voltage of ZnO TFT can be attributed to deep states density variation in the film.
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