Charge Storage Characteristics in Metal-Oxide-semiconductor Memory Structure Based on Gradual Ge1-xSix/Si Heteronanocrystals

Jin Lu,Zheng Zuo,Yubin Chen,Yi Shi,Lin Pu,Youdou Zheng
DOI: https://doi.org/10.1063/1.2828693
IF: 4
2008-01-01
Applied Physics Letters
Abstract:Charge storage characteristics in the metal-oxide-semiconductor memory structure based on gradual Ge1−xSix∕Si heteronanocrystals (HNCs) have been investigated by using capacitance-voltage measurements. The gradual Ge1−xSix∕Si HNCs on ultrathin SiO2 were fabricated through combining self-assembled growth and selective chemical etching technique. The observations demonstrate that the holes reach a longer retention time even with an ultrathin tunnel oxide, owing to the high band offset at the valence band between Ge and Si.
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