Influence of Annealing on ZnO Thin Films Prepared by Cathodic Vacuum Arc Deposition

WANG Ming-dong,ZHENG Ting,ZHU Dao-yun,HE Zhen-hui,CHEN Di-hu,WEN Li-shi
DOI: https://doi.org/10.16553/j.cnki.issn1000-985x.2008.01.043
2008-01-01
Abstract:By using cathodic vacuum arc deposition,uniform and compacted ZnO thin films with preferred orientation were successfully deposited on the silicon,Al2O3 and glass substrates.Thus the ZnO thin films were annealed in air to optimize the property.The structures,morphologies,and the optical properties of ZnO thin films were investigated by X-ray diffraction(XRD),scan electron microscopy(SEM),UV-visible spectrophotometer and photoluminescence(PL) at room temperature.The XRD patterns show that all ZnO thin films annealed in air have preferred orientation of ZnO(002),and the diffraction peaks shift to the higher angle with the upward annealing temperatures.SEM images show that grain-morphologies change from tower or mountain shape to plane shape with six-side with raising temperature.Both PL and transparency spectra indicate that impurities were reduced by annealing,and the transparency of ZnO thin films annealed at 550℃ increase to 85% in visible range,and the corresponding optical band gaps decreasing.
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