Influence of Postdeposition Annealing on Crystallinity of Zinc Oxide Films

吕建国,叶志镇,黄靖云,赵炳辉,汪雷
DOI: https://doi.org/10.3321/j.issn:0253-4177.2003.07.011
2003-01-01
Abstract:The influence of postdeposition annealing on the crystallinity of ZnO films is investigated. ZnO films are prepared by DC reactive magnetron sputtering, and then annealed in oxygen ambient at different temperature (200-1000°C). The properties are examined by X-ray diffraction (XRD), atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). An annealing model for ZnO films is proposed, through which the effect of annealing treatment on the crystallinity of ZnO films is discussed in detail. The as-grown films possessed c-axis orientation, which is enhanced in the annealing process. When the annealing temperature shows up, the tensile stress along c-axis orientation decreases, while the compressive stress increases; at the same time, the grain size of the film is reduced, which results in a much rougher surface. ZnO films possessed a better crystallinity at the stress release temperature (SRT) about 640°C, such as high c-axis orientation, almost stress free and low surface roughness.
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