Analysis Of Metal Routing Technique In A Novel Dual Direction Multi-Finger Scr Esd Protection Device

Do Xiaoyang,Dong Shurong,Han Yan,J. J. Liou
DOI: https://doi.org/10.1109/ICSICT.2008.4734540
2008-01-01
Abstract:A novel dual direction SCR (DDSCR) ESD protection device is implemented in HJTK 0.18-mu m CMOS process without deep N-well or T-well masks. Both parallel and anti-parallel metal routing method of multi-fingered DDSCR is investigated in this paper. It shows that metal routing in layout design plays an important role in the performance of multi-fingered DDSCR due to its symmetrical TLP I-V plot characteristics
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