Silicon based photonic quantum dots

Kunji Chen,San Chen,Bo Qian,Xiangao Zhang,Wei Li,Jun Xu,XinFan Huang
DOI: https://doi.org/10.1109/GROUP4.2008.4638111
2008-01-01
Abstract:We use a patterned conformal deposition technique to fabricate Si-based 3D optical microcavities. The size-dependent confined photonic modes were observed when the size is reduced to 1.0 μm which is similar to the quantum effect of electronic states in semiconductor quantum dots. © 2008 IEEE.
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