Abstract:Despite the superiority in quantum properties, self-assembled semiconductor quantum dots face challenges in terms of scalable device integration because of their random growth positions, originating from the Stranski-Krastanov growth mode. Even with existing site-controlled growth techniques, for example, nanohole or buried stressor concepts, a further lithography and etching step with high spatial alignment requirements isnecessary to accurately integrate QDs into the nanophotonic devices. Here, we report on the fabrication and characterization of strain-induced site-controlled microcavities where site-controlled quantum dots are positioned at the antinode of the optical mode field in a self-aligned manner without the need of any further nano-processing. We show that the Q-factor, mode volume, height, and the ellipticity of site-controlled microcavities can be tailored by the size of an integrated AlAs/Al2O3 buried stressor, with an opening ranging from 1 to 4 $\mu$m. Lasing signatures, including super-linear input-output response, linewidth narrowing near threshold, and gain competition above threshold, are observed for a 3.6-$\mu$m self-aligned cavity with a Q-factor of 18000. Furthermore, by waiving the rather complex lateral nano-structuring usually performed during the fabrication process of micropillar lasers and vertical-cavity surface emitting lasers, quasi-planar site-controlled cavities exhibit no detrimental effects of excitation power induced heating and thermal rollover. Our straightforward deterministic nanofabrication concept of high-quality quantum dot microcavities integrates seamlessly with the industrial-matured manufacturing process and the buried-stressor techniques, paving the way for exceptional scalability and straightforward manufacturing of high-\b{eta} microlasers and bright quantum light sources.

Si-based Photonic Quantum Dots with the Self-Similar Distributed Bragg Reflectors

Photonic Quantum Dots Based on Bragg Reflectors Grown by Conformal Deposition on Patterned Substrates

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Optical Study of Spatially Ordered Inas Quantum Dots in Disk-Like Structures

Size Dependence of Optical Eigenmodes in Photonic Quantum Dots Prepared by Conformal Deposition Method

Silicon based photonic quantum dots

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Conformal Coverage for Two-Dimensional Arrays of Microcavites with Quasi-Three Dimensional Confinement by Distributed Bragg Reflectors

Two-dimensional cavity resonant modes of Si based bragg reflection ridge waveguide

Optical characteristics of cavity structures with Al0.2Ga0.8As/Al0.9Ga0.1As distributed Bragg reflectors and In0.37Ga0.63As quantum dots as the active region

Photoluminescence Enhancement of Colloidal Quantum Dots Embedded in a Microcavity

Single- and Twin-Photons Emitted from Fiber-Coupled Quantum Dots in a Distributed Bragg Reflector Cavity

Silicon-based one-dimensional photonic crystal microcavity

Si-Based Microcavity Devices With Ge Quantum Dots

Self-aligned photonic defect microcavities with site-controlled quantum dots

Three dimensional photonic crystal micro-cavity for single photon source

Modified Photoluminescence by Silicon-Based One-Dimensional Photonic Crystal Microcavities

Cavity-Quantum Electrodynamics with Moiré Flatband Photonic Crystals

Luminescence behavior from amorphous silicon-carbide film-based optical microcavities

Strain Spectrally-Tunable Single-Photon Source Based on a Quantum Dot in Microcavity (conference Presentation)

Optical Fabrication and Characterisation of SU-8 Disk Photonic Waveguide Heterostructure Cavities.