Study of Heat Stability of Ni-W Alloys Film for Micro-Devices

LIU Rui,WANG Hong,YAO Jin-yuan,LI Xue-ping,DING Gui-fu,ZHAO Xiao-lin
DOI: https://doi.org/10.3321/j.issn:1001-9731.2008.02.013
2008-01-01
Abstract:This paper introduces the effect of current density,pH,pulse parameter in the system of citrate amine-HEDP and heat treatment on the hardness of Ni-W alloy films.The results show that electrodeposition conditions improve hardness slightly,and heat processing can increase hardness obviously while wear resistance has little change.We also study hardness,wear resistance in dry friction condition and variation of micro-structure of electrodeposited and heat treated Ni and Ni-W alloy films.It is concluded that grain size increase dramatically,hardness and wear resistance of Ni film decrease by twothirds after heat treatment.However,the heat treated Ni-W alloy films still has high hardness and wearing resistance because of change of microstructure.Therefore,Ni-W alloy films could replace Ni film in MEMS devices with special conditions due to its good thermal stability.
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