Electrodepositing amorphous Ni-W alloys for MEMS

Hong Wang,Rui Liu,FengJi Cheng,Ying Cao,GuiFu Ding,XiaoLin Zhao
DOI: https://doi.org/10.1016/j.mee.2009.11.018
IF: 2.3
2010-01-01
Microelectronic Engineering
Abstract:The wearing resistance and corrosion resistance of Ni-W alloy films is more excellent than that of Ni film. As a contrast, wearing resistance and corrosion resistance of Ni and NiW films are investigated in this paper. The results show that electrodeposited amorphous Ni-W alloy films have good wearing resistance and excellent corrosion resistance compared with electrodeposited Ni films. Moreover, the Ni-W alloy films still had good properties after heat treatment. The good wearing resistance and corrosion resistance of amorphous Ni-W alloy films are associated with crystal structure. The micro-spinneret is fabricated successfully with amorphous Ni-W alloys by UV-LIGA technology.
What problem does this paper attempt to address?