Study on Mechanical Properties of Ni-W Alloy Films in Micro-Electro-mechanical System

刘瑞,汪红,汤俊,毛胜平,陈辉,丁桂甫
DOI: https://doi.org/10.13873/j.1000-97872009.08.005
2009-01-01
Abstract:The mechanical properties of Ni-W alloy films electrodeposited in the system of citrate amine-HEDP are sdudied.The testing chip is fabricated with UV-LIGA technology and measured by uniaxial micro-tensile system.The gauge section of Ni-W thin film specimen is 5μm×50μm×100μm.The results show that the Young's modulus of Ni-W film is about 100.4GPa,tensile strength is about 1.96GPa and strain is about 3.6%,respectively.
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