Effects of Mg Doping on the Properties of Highly Transparent Conductive and Near Infrared Reflective Zn1−xMgxO:Ga Films

Quan-Bao Ma,Hal-Ping He,Zhi-Zhen Ye,Li-Ping Zhu,Jing-Yun Huang,Yin-Zhu Zhang,Bing-Hui Zhao
DOI: https://doi.org/10.1016/j.jssc.2007.12.032
IF: 3.3
2008-01-01
Journal of Solid State Chemistry
Abstract:Highly transparent conductive and near infrared (IR) reflective Gallium-doped ZnMgO (Zn1−xMgxO:Ga) films with Mg content from 0 to 10at% were deposited on glass substrate by DC reactive magnetron sputtering. X-ray diffraction shows all the ZnMgO:Ga films are polycrystalline and have wurtzite structure with a preferential c-axis orientation. Hall measurements indicate that the resistivity of these films obviously increases with the Mg concentration increasing. The average transmittance of Zn1−xMgxO:Ga films is over 90% in the visible range. All the Zn1−xMgxO:Ga films have low transmittance and high reflectance in the IR region.
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