Structural and Optical Properties of Mg Doped ZnO Thin Films Deposited by DC Magnetron Sputtering

A. Abduev,M. A. Aliev,A. Asvarov,B. Bilalov,S. Makhmudov,A. Akhmedov
DOI: https://doi.org/10.21272/JNEP.8(4(2)).04053
Abstract:This paper reports the growth and characterization of transparent magnesium doped zinc oxide (ZnO:Mg) thin films prepared on glass substrates by dc magnetron sputtering. The effects of the Mg concentrations (0, 1 and 5 at %) and working gas compositions (pure Ar and Ar-O2 mixture) on the structural and optical properties of the ZnO:Mg thin films were investigated. The experiment results showed that the ZnO and ZnO:Mg thin films are polycrystalline with a hexagonal wurtzite structure exhibiting a preferred (002) crystal plane orientation. The results indicated that the crystallinity of ZnO:Mg thin films was significantly affected by both Mg-doping and the woking gas composition. Optical studies revealed that the optical band gap increases with Mg concentration.
Materials Science,Physics
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