Abstract:Silicon nitride ceramics of high thermal conductivity is a promising candidate for application as ceramic IC substrates. The thermal conductivity of Si3N4 can be changed greatly by the use of different sintering additives. In this work, different systems of additives were used to sinter the silicon nitride ceramics, including Y2O3-MgO, Y2O3-CaO, CeO2-MgO, CeO2-CaO, La2O3-MgO and La2O3-CaO, and their effects on the thermal conductivity and the mechanical and electrical properties of the sintered Si3N4 ceramics were studied. The ceramics were sintered by the spark plasma sintering (SPS) method at 1500 degrees C for 5 min which was then heat treated at 1900 degrees C for 3 h under N-2 atmosphere. Results showed that the conductivities of the ceramics sintered from the rare-earth additives tended to decrease with the increase of the cation radius in the rare-earth oxides. Different from the use of MgO, the additives of CaO did not generate the desired rod-like grains of silicon nitride which thus led to a lower thermal conductivity and a lower strength of the ceramics, although it gave a higher ceramic hardness. In contrast, the Y2O3-MgO additive system, under the optimized sintering conditions, provided a higher thermal conductivity of 80 W//m.K, with the bend strength larger than 1000 MPa. Meanwhile, the bulk resistivity was higher than 10(13)Omega.m, the dielectric constant was lower than 10 and the dielectric dissipation fraction below 3x10(-3).

Oxidation behavior and mechanical property of Si3N4 ceramics with rare earth oxide addition

The Fabrication, Mechanical Property And Oxidation Of Si3n4 Ceramics With Rare Earth Oxide Addition

Optimization of Microstructure to Improve Si3n4 Ceramics with Thermal Conductivity and Mechanical Properties: Effect of Si and Α-Si3n4 Powder Composition

Mechanical Property and Oxidation Behavior of Self-Reinforced Si3N4 Doped with Re2O3 (Re=Yb, Lu)

New Design Concept for Stable Α-Silicon Nitride Based on the Initial Oxidation Evolution at the Atomic and Molecular Levels

Effect of rare earths on mechanical properties and microstructures of Si3N4-based ceramics

Microstructure and Performance of Silicon Nitride Ceramics with Lu2O3 Additives

Effect of Rare Earth Additives on Properties of Silicon Nitride Ceramics

Effect of pre-oxidation on the microstructure, mechanical and dielectric properties of highly porous silicon nitride ceramics

Mechanical Properties and Oxidation Behavior of Si<sub>3</sub>N<sub>4</sub>/BN Laminated Ceramics

Effects of Rare-Earth Oxide Additions and Heat-Treatment Temperature on the Transformation and Microstructure of Silicon Nitride

Mechanical Properties and Oxidation Behavior of Si<sub>3</sub>N<sub>4</sub>/BN Laminated Ceramics

Effect of Re2O3–MgO additives on the microstructure evolution and properties of β-Si3N4 ceramics

Effect of Er2O3/MgO ratio on mechanical and thermal properties of Si3N4 ceramics

Non-additive sintering of Si2N2O ceramic with enhanced high-temperature strength, oxidation resistance, and dielectric properties

Enhancing oxidation resistance of silicon nitride using a Ca 2+ stabilizer

The effect of additives on sintering behavior and strength retention in silicon nitride with RE-disilicate

Fabrication and properties of pressure-sintered reaction-bonded Si3N4 ceramics with addition of Eu2O3–MgO–Y2O3

Realizing mechanical property improvement and coloration in Si3N4 ceramics by rare earth-doping

Effect Of Rare-Earth Additives On Thermal Conductivity, Mechanical And Electrical Properties Of Silicon Nitride Ceramics

Mechanical properties and oxidation behavior of Si3N 4/BN laminated ceramics

Oxidation behavior and mechanical property of Si3N4 ceramics with rare earth oxide addition

The Fabrication, Mechanical Property And Oxidation Of Si3n4 Ceramics With Rare Earth Oxide Addition

Optimization of Microstructure to Improve Si3n4 Ceramics with Thermal Conductivity and Mechanical Properties: Effect of Si and Α-Si3n4 Powder Composition

Mechanical Property and Oxidation Behavior of Self-Reinforced Si3N4 Doped with Re2O3 (Re=Yb, Lu)

New Design Concept for Stable Α-Silicon Nitride Based on the Initial Oxidation Evolution at the Atomic and Molecular Levels

Effect of rare earths on mechanical properties and microstructures of Si3N4-based ceramics

Microstructure and Performance of Silicon Nitride Ceramics with Lu2O3 Additives

Effect of Rare Earth Additives on Properties of Silicon Nitride Ceramics

Effect of pre-oxidation on the microstructure, mechanical and dielectric properties of highly porous silicon nitride ceramics

Mechanical Properties and Oxidation Behavior of Si<sub>3</sub>N<sub>4</sub>/BN Laminated Ceramics

Effects of Rare-Earth Oxide Additions and Heat-Treatment Temperature on the Transformation and Microstructure of Silicon Nitride

Mechanical Properties and Oxidation Behavior of Si&lt;sub&gt;3&lt;/sub&gt;N&lt;sub&gt;4&lt;/sub&gt;/BN Laminated Ceramics

Effect of Re2O3–MgO additives on the microstructure evolution and properties of β-Si3N4 ceramics

Effect of Er2O3/MgO ratio on mechanical and thermal properties of Si3N4 ceramics

Non-additive sintering of Si2N2O ceramic with enhanced high-temperature strength, oxidation resistance, and dielectric properties

Enhancing oxidation resistance of silicon nitride using a Ca 2+ stabilizer

The effect of additives on sintering behavior and strength retention in silicon nitride with RE-disilicate

Fabrication and properties of pressure-sintered reaction-bonded Si3N4 ceramics with addition of Eu2O3–MgO–Y2O3

Realizing mechanical property improvement and coloration in Si3N4 ceramics by rare earth-doping

Effect Of Rare-Earth Additives On Thermal Conductivity, Mechanical And Electrical Properties Of Silicon Nitride Ceramics

Mechanical properties and oxidation behavior of Si3N 4/BN laminated ceramics

Mechanical Properties and Oxidation Behavior of Si<sub>3</sub>N<sub>4</sub>/BN Laminated Ceramics