Abstract:Silicon nitride ceramics of high thermal conductivity is a promising candidate for application as ceramic IC substrates. The thermal conductivity of Si3N4 can be changed greatly by the use of different sintering additives. In this work, different systems of additives were used to sinter the silicon nitride ceramics, including Y2O3-MgO, Y2O3-CaO, CeO2-MgO, CeO2-CaO, La2O3-MgO and La2O3-CaO, and their effects on the thermal conductivity and the mechanical and electrical properties of the sintered Si3N4 ceramics were studied. The ceramics were sintered by the spark plasma sintering (SPS) method at 1500 degrees C for 5 min which was then heat treated at 1900 degrees C for 3 h under N-2 atmosphere. Results showed that the conductivities of the ceramics sintered from the rare-earth additives tended to decrease with the increase of the cation radius in the rare-earth oxides. Different from the use of MgO, the additives of CaO did not generate the desired rod-like grains of silicon nitride which thus led to a lower thermal conductivity and a lower strength of the ceramics, although it gave a higher ceramic hardness. In contrast, the Y2O3-MgO additive system, under the optimized sintering conditions, provided a higher thermal conductivity of 80 W//m.K, with the bend strength larger than 1000 MPa. Meanwhile, the bulk resistivity was higher than 10(13)Omega.m, the dielectric constant was lower than 10 and the dielectric dissipation fraction below 3x10(-3).

Effect of rare earths on mechanical properties and microstructures of Si3N4-based ceramics

Optimization of Microstructure to Improve Si3n4 Ceramics with Thermal Conductivity and Mechanical Properties: Effect of Si and Α-Si3n4 Powder Composition

New Route to Improve the Fracture Toughness and Flexural Strength of Si3N4 Ceramics by Adding FeSi2

Effect Of Rare-Earth Additives On Thermal Conductivity, Mechanical And Electrical Properties Of Silicon Nitride Ceramics

Realizing mechanical property improvement and coloration in Si3N4 ceramics by rare earth-doping

Effects of additives to Si3N4 matrix on microstructure and properties of laminated Si3N4/BN ceramics

Microstructure and Performance of Silicon Nitride Ceramics with Lu2O3 Additives

The effects of the single additive on the fabrication of rod-like beta-Si3N4

Oxidation behavior and mechanical property of Si3N4 ceramics with rare earth oxide addition

Effect of Er2O3/MgO ratio on mechanical and thermal properties of Si3N4 ceramics

Thermal Conductivity and Mechanical Property of Si<sub>3</sub>N<sub>4</sub> Ceramics Sintered with CeF<sub>3</sub>/LaF<sub>3</sub> Additives

Effect of Rare Earth Additives on Properties of Silicon Nitride Ceramics

The Effects of the Single Additive on the Fabrication of Rod-like β-Si3N4

Microstructural Evolution and Mechanical Properties in Yb2O3–Fluxed Silicon Nitride Ceramics

The Fabrication, Mechanical Property And Oxidation Of Si3n4 Ceramics With Rare Earth Oxide Addition

Microstructural Evolution and Mechanical Properties in Yb2o3-Fluxed Silicon Nitride Ceramics

Effect of Re2O3–MgO additives on the microstructure evolution and properties of β-Si3N4 ceramics

Thermal Conductivity and Mechanical Property of Si<sub>3</sub>N<sub>4</sub> Ceramics Sintered with CeF<sub>3</sub>/LaF<sub>3</sub> Additives

The effect of additives on sintering behavior and strength retention in silicon nitride with RE-disilicate

Effects of rare-earth yttrium on crystallization and magnetic properties of Fe71 .4Si13B9.6Mo2Cr1Cu1P2nanocrystalline alloy

Microstructure And Mechanical Properties Of Silicon Nitride Ceramics

Effect of rare earths on mechanical properties and microstructures of Si3N4-based ceramics

Optimization of Microstructure to Improve Si3n4 Ceramics with Thermal Conductivity and Mechanical Properties: Effect of Si and Α-Si3n4 Powder Composition

New Route to Improve the Fracture Toughness and Flexural Strength of Si3N4 Ceramics by Adding FeSi2

Effect Of Rare-Earth Additives On Thermal Conductivity, Mechanical And Electrical Properties Of Silicon Nitride Ceramics

Realizing mechanical property improvement and coloration in Si3N4 ceramics by rare earth-doping

Effects of additives to Si3N4 matrix on microstructure and properties of laminated Si3N4/BN ceramics

Microstructure and Performance of Silicon Nitride Ceramics with Lu2O3 Additives

The effects of the single additive on the fabrication of rod-like beta-Si3N4

Oxidation behavior and mechanical property of Si3N4 ceramics with rare earth oxide addition

Effect of Er2O3/MgO ratio on mechanical and thermal properties of Si3N4 ceramics

Thermal Conductivity and Mechanical Property of Si&lt;sub&gt;3&lt;/sub&gt;N&lt;sub&gt;4&lt;/sub&gt; Ceramics Sintered with CeF&lt;sub&gt;3&lt;/sub&gt;/LaF&lt;sub&gt;3&lt;/sub&gt; Additives

Effect of Rare Earth Additives on Properties of Silicon Nitride Ceramics

The Effects of the Single Additive on the Fabrication of Rod-like β-Si3N4

Microstructural Evolution and Mechanical Properties in Yb2O3–Fluxed Silicon Nitride Ceramics

The Fabrication, Mechanical Property And Oxidation Of Si3n4 Ceramics With Rare Earth Oxide Addition

Microstructural Evolution and Mechanical Properties in Yb2o3-Fluxed Silicon Nitride Ceramics

Effect of Re2O3–MgO additives on the microstructure evolution and properties of β-Si3N4 ceramics

Thermal Conductivity and Mechanical Property of Si<sub>3</sub>N<sub>4</sub> Ceramics Sintered with CeF<sub>3</sub>/LaF<sub>3</sub> Additives

The effect of additives on sintering behavior and strength retention in silicon nitride with RE-disilicate

Effects of rare-earth yttrium on crystallization and magnetic properties of Fe71 .4Si13B9.6Mo2Cr1Cu1P2nanocrystalline alloy

Microstructure And Mechanical Properties Of Silicon Nitride Ceramics

Thermal Conductivity and Mechanical Property of Si<sub>3</sub>N<sub>4</sub> Ceramics Sintered with CeF<sub>3</sub>/LaF<sub>3</sub> Additives