Low Temperature Crystallization and Thick Single Layer of Pbtio3 Thin Film by Metallo-Organic Compound Decomposition with an Additive of Pvac

Xiaoqing Wu,Wei Ren,Peng Shi,Haiyan Li,Xi Yao
DOI: https://doi.org/10.1080/00150190600689639
2006-01-01
Ferroelectrics
Abstract:Polyvinyl acetate (PVAC) has been investigated as an additive in a metallo-organic decomposition process to increase the single-layer thickness and reduce the crystallization temperature of PbTiO3 thin films. It has been found that PbTiO3 thin films obtained are dense and crack-free. PVAC can reduce the crystallization temperature of PbTiO3 thin films from 550 degrees C to 450 degrees C. The single-layer thickness of the crack-free films increases from 0.08 mu m to 0.83 mu m by adding PVAC in PbTiO3 precursor solutions. Adding PVAC in PT precursor solutions can effectively improve the preparing process of PbTiO3 thin films and make it more compatible with an IC process.
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