Research on Suppressing Crack Formation in the PT Ferroelectric Thin Film by PVAC
Li Haiyan,Wu Xiaoqing,Hao Haiyan,Yao Xi,Ren Wei,Zhang Liangying
DOI: https://doi.org/10.3321/j.issn:1002-185X.2005.z2.102
2005-01-01
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
Abstract:Using metallo-organic decomposition method, single-layer thickness of PbTiO3 (PT) thin films was increased to 0.78μm by adding polyvinyl acetate (PVAC). The reaction mechanism of PT precursor, the morphology and phase structure of PT thin films were investigated through analysis of infrared spectrum, SEM, XRD, respectively. The reason that PVAC can suppress crack formation in PT thin films was discussed. The experimental results have shown, titanium butoxide combined with PVAC can produce polyvinyl titanium butoxide, 2-butoxyethanol solvent combined with PVAC can form hydrogen bond. In this condition, stereo-netted structure is prone to formation. The stereo-netted structure enhanced elasticity of the thin films and suppressed crack formation in the films. Furthermore, PVAC made crystalline temperature of PT thin films decrease from 550°C to 500°C.