Influence of Annealing Temperature on Crystallization and Dielectric Properties of Barium Strontium Titanate Films Prepared by Improved Sol-Gel Method
Liao Jiaxuan,Pan Xiaofeng,Wang Hongquan,Zhang Jia,Fu Xiangjun,Tian Zhong
DOI: https://doi.org/10.3321/j.issn:1002-185x.2009.z2.167
2009-01-01
Rare Metal Materials and Engineering
Abstract:Ba0.6Sr0.4TiO3 (BST) films were prepared by improved Sol-gel method, and the effect of annealing temperature on the crystallization and the dielectric properties of the BST films was studied. X-ray diffraction shows that the BST films exhibit weak diffraction peak intensities because the films were quite thin. From 600 to 750, 600 degrees C corresponds to the weakest (110) orientation peak intensity. As the annealing temperature increases, the (110) peak intensity gradually increases, and the other diffraction peaks also appear. Scanning electron microscope presents that the BST films, which are smooth and compact with no crack or shrinkage cavity, display improved surface morphologies. With the increasing annealing temperature the crystallization of the BST films enhances with increasing crystal size and roughness. These morphologies are also confirmed by atomic force microscope. Meanwhile, the BST films illustrate significantly improved dielectric properties with more than 30% dielectric tunability at 40 V and less than 0.02 dielectric loss (tan delta) at zero bias. The dielectric properties are strongly dependent on the annealing temperature. 650 degrees C corresponds to the optimum dielectric property with the highest dielectric tenability of 45.1% and the lowest dielectric loss of 0.0187. Also, the correlative mechanism among film structure, dielectric properties and annealing temperature is discussed.