Abstract:Epitaxial compositionally graded (Ba 1-x Sr x )TiO 3 (BST) (0.0≤x≤0.25) thin films were deposited on (100) LaAlO 3 substrates by pulsed laser ablation, the substrates having bottom electrodes made of 100-nm-thick conductive La 0.5 Sr 0.5 CoO 3 (LSCO). Extensive X-ray diffraction, rocking-curve, and φ-scan studies indicate that the graded films are (100)-oriented and exhibit good in-plane relationships of [010] BST //[010] LAO and [001] BST //[001] LAO . For the up-graded films with barium concentration (1-x) increasing across the film thickness in the direction from the film/substrate interface to the film surface, the full width at half maximum of the BST film (200) rocking curve and the surface roughness, examined by atomic force microscopy, were larger than those of the down-graded films with barium concentration decreasing from the film/substrate interface to the film surface. The dielectric properties of the graded films, measured using vertical structures, show that at room temperature, the dielectric constant (ε r ) and dissipation factor (cosδ) at 100 kHz were 380 and 0.013 for the up-graded films, and 650 and 0.010 for the down-graded films, respectively. The dielectric behavior was enhanced in the down-graded films, which was attributed to the fact that the pure BaTiO 3 layer in the down-graded BST films not only serves as a bottom layer but also acts as an excellent seeding layer for enhancing subsequent film growth, leading to better film crystallinity and larger grain sizes in the down-graded films. The graded BST films undergo a diffuse phase transition, giving a broad, flat capacitance-versus-temperature profile. With such a graded structure, it is possible to build a dielectric thin-film capacitor having a capacitance which has a low temperature dependence over a broad temperature regime.

The influence of post-annealing on the chemical structures and dielectric properties of the surface layer of Ba<sub>0.6</sub>Sr<sub>0.4</sub>TiO<sub>3</sub> films

Determination Of Refractive Indices And Thicknesses Of Ba0.7sr0.3tio3 Films With And Without Mgo (001) Buffer Layer On Silicon Substrate

Manipulation of phase transitions and electrical properties of Ba<sub>1-x</sub>Sr<sub>x</sub>TiO<sub>3</sub> thin films through orientation engineering

The Effect of Deposition Temperature and Postannealing on the Dielectric Properties of Ba_(0.5)Sr_(0.5)TiO_3 Thin Films

Preparation and characterization of crystalline Ba0.5Sr0.5TiO3 thin films on FTO transparent electrodes

Barium strontium titanate (BST) thin film analysis on different layer and annealing temperature

Investigation of microstructure evolution in Pt-doped TiO2 thin films deposited by rf magnetron sputtering

Microstructure And Electrical Properties Of (Ba,Sr)Tio3 Thin Films Prepared By A Sol-Gel Method

Preparation and Dielectric Properties of BST Films Deposited on Ti5Si3 Electrode Layer

Stoichiometry control and structure evolution in hydrothermally derived (Ba,Sr)TiO3 films

Structure and Ferroelectric Properties of Barium Titanate Films Synthesized by Sol–gel Method

Microstructural and Morphological Evolutions in Compositionally-Graded (ba 1−x Sr X )tio 3 Thin Films and Related Dielectric Properties

Enhanced Piezoresponse and Dielectric Properties for Ba1-XSrXTiO3 Composition Ultrathin Films by the High-Throughput Method

Dielectric characteristics of barium strontium titanate films prepared by aerosol deposition on a Cu substrate

The Effect of B2o3-Li2co3 Addition on Sintering Behavior and Dielectric Properties of Ba0.6sr0.4tio3 Ceramics

Enhanced Tuning Properties of (ba, Sr)Tio3 Bilayer Thin Films Formed by Rf Magnetron Sputtering

Preparation of epitaxial compositionally graded (Ba 1-x Sr x )TiO 3 thin films with enhanced dielectric properties

Influence of Annealing Temperature on Microstructure and Phase Transformations of Oxide System Bi2O3/TiO2 Formed in Aqueous Solutions

Effect of sulfur hexafluoride gas and post-annealing treatment for inductively coupled plasma etched barium titanate thin films

Analysis of Decomposed Layer Appearing on the Surface of Barium Strontium Titanate

Influence of the Vicinal Surface on the Anisotropic Dielectric Properties of Highly Epitaxial Ba0.7Sr0.3TiO3thin Films