Surface Structures and Dielectric Properties of Yttrium-Doped Barium Strontium Titanate Films by Improved Sol-Gel Method

Pan Xiaofeng,Liao Jiaxuan,Wang Hongquan,Zhang Jia,Fu Xiangjun,Wei Xiongbang
DOI: https://doi.org/10.3724/sp.j.1077.2009.00387
IF: 1.292
2009-01-01
Journal of Inorganic Materials
Abstract:Yttrium (Y)-doped Ba0.6Sr0.4TiO3 (BST) films were prepared on Pt/Ti/SiO2/Si by improved Sol-gel method. The surface structure and dielectric properties of the BST films were investigated. X-ray photoelectron spectrum shows that the surface structures of Y-doped BST films are composed of perovskite structure and non-perovskite structure, and Y doping is helpful to increase the amount of perovskite structure, but is not so obvious to reduce oxygen vacancies. Scanning electron microscope and atomic force microscope exhibit that Y doping is beneficial to reduce stress and cracks, make crystal size smaller, and thus improve film surface structure. Also, Y doping markedly improves film dielectric properties with more than 40% tunability at 40 V, about 0.0210 dielectric loss (tan delta) at zero bias and hence merit value more than 20 figure.
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