Preparation and Characterization on the Mn-Doped BST Thin Film

Jun Bao
2002-01-01
Abstract:Undoped and Mn(Ⅱ) doped barium strontium titanate (BST) thin films have been prepared by a 'water based' sol gel method.With this method,BST stock solution can be easily doped with any concentration of aqueous metal ion solution and can be stocked for more than a month at room temperature.The crystallization temperature of 650~750 °C is suitable for the films from the results of both the X ray diffraction (XRD) patterns and the surface topography.The Mn2p 3/2 X ray photoelectron spectra (XPS) pattern of the BST thin film shows that the valence state of the Mn doped BST has a same valance as the Mn(Ⅱ) dopant.Considering the peak shift of the binding energy,it is proposed that the fermi level of the Mn doped BST has been shifted down by 0 7 eV.The leakage current and dielectric loss of the BST films have been greatly reduced due to the Mn(Ⅱ) doping.
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