Controlling growth of aligned carbon nanotube bundles arrays with microwave plasma CVD

Jun Liu,Shaozhi Deng,Ning Xu,Jun Chen,Yanlin Ke
DOI: https://doi.org/10.1109/IVNC.2006.335292
2006-01-01
Abstract:A method was employed to improve the growth condition of carbon nanotube (CNT) in microwave plasma CVD system. Plasma etching on silicon substrates was avoided effectively. CNT bundles arrays were synthesized and the CNTs were vertical to the substrate. ©2006 IEEE.
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