Study on the Definite Direction Growth of Carbon Nanotubes by the Microwave Plasma-Enhanced Chemical Vapro Phase Deposition

M Wang,ZH Li,H Takegawa,Y Saito
DOI: https://doi.org/10.7498/aps.53.888
IF: 0.906
2004-01-01
Acta Physica Sinica
Abstract:Using the microwave plasma-enhanced chemical vapor phase deposition,in the gas mixture of the methane and hydrogen, the aligned growth of the carbon nanotubes was observed and analyzed with a scanning electron microscope.The carbon nanotubes have the tidy arrangement in the perpendicular direction on a solid substrate.Its length is the same as the uniform caliber.This kind of carbon nanotubes can be used as the potential electron source material.
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