Abstract:The characteristics of vibrations in microbolometer had significant impact on the performances of its infrared absorption. Due to the complex architectures, leading to the unfavorable connection between the analysis of infrared absorption and vibrations. To solve this issue, a finite element analysis (FEA) method was designed to make better compatible with infrared absorption and vibrations, as well as the resonant frequency analysis was completed. A vanadium oxide (VO2) based microbolometer was designed, and the corresponding three-dimensional (3D) modeling was also built. By vibrations and resonant frequency FEA, mechanics and frequency characteristic were studied. 200 G, 500 G and 1000 G acceleration vibrations were loaded on the 3D model at Z axis, which perpendicular to the bridge-like structure. It shows that under 500 G acceleration vibration, the deformation of the model was small enough to ensure the resonant cavity maintained lambda/4 which means a high IR absorption for the microbolometer. The first order modal frequency, the second order modal frequency and the third order modal frequency of the 3D model were also analyzed. Purpose of resonant frequency analyzing of microbolometer was to avoid devices work on this frequency result of failure. Finally, an uncooled infrared focal plane was fabricated, and the experimental data matched the simulation fitting results. Perfect performance in mechanical properties, IR absorption and imaging effect of experimental device indicating a shorter design cycle and low cost potential. The fast, efficient FEA design method enables simulating infrared absorption and vibrations together.

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Optical Property Analysis of Microbolometer Based on MEMS

OPTICAL AND THERMAL DESIGN FOR MICROBOLOMETER

Simulation of Microbolometers Based on A-Si:H Thin Films with Thermal and Mechanical Performance

Influence of temperature on infrared optical system and athermal design

Study on Optical Properties of Microbolometers in Oblique Incidence

Optical Optimization and Simulation of Micro-bolometers Based on Α-Si:H Thin Film

Performance Analysis of Microbolometer Microbridge Structure

Design and Simulation of Infrared Absorption Based on Hydrogenated Amorphous Silicon Thin Film

Research On Thermal Conductivity Measurement Of Submicrometer-Scale Silicon Dioxide Film In Thermal Flow Sensor By Micro-Raman Technique

Analysis on Vibrations and Infrared Absorption of Uncooled Microbolometer

A Thermal Analysis of the Operation of Microscale, Inorganic Light-Emitting Diodes

Thermal Analysis of Microbolometer FPA

Measurement of the Thermal Transport Properties of Dielectric Thin Films Using the Micro-Raman Method

Integrated A-Si : B Microbolometer Arrays Based on Improved Porous Silicon Micromachining Techniques

Thermal Behavior of Amorphous Silicon Thin Film Transistor and Its Application to Micromachined Uncooled Infrared Sensors

Design and Simulation of Microbolometer with Dual Cavity for High Figure of Merits

Deformation Analysis of Bolometer Micro-bridges

Study on new structure uncooled a-Si microbolometer for infrared detection

The Design & Finite Element Analysis of the Thermal Isolated Bridge Leg of the U ncooled Microbolometer

Thermal Conductivity Measurements of Ultra-Thin Single Crystal Silicon Films Using Improved Structure