Properties of CIGS Thin-Films Prepared by a Three-Stage of Co-Evaporation Process

Ao Jianping,Sun Yun,Wang Xiaoling,Li Fengyan,He Qing,Sun Guozhong,Zhou Zhiqiang,Li Changjian
DOI: https://doi.org/10.3969/j.issn.1674-4926.2006.08.014
2006-01-01
Chinese Journal of Semiconductors
Abstract:CIGS thin films are deposited in a three-stage co-evaporation process by using a simple PID controller.The composition of the CIGS thin films can be controlled on-line by monitoring the temperature change of the substrates while using constant power to heat the substrates.These methods can greatly improve the controllability and reproducibility of depositing CIGS thin films.The surfaces of the CIGS films are smooth, with a roughness less than 10nm. However,the preferential orientations of the CIGS thin films with the same component are different,though most of them are (112).Moreover,the grain sizes of the CIGS thin films are also very different.Although the CIGS films have Cu-poor compositions,Cu/(In+Ga)<1,most of them are p-type semiconductors, and a few are n-type,as determined by Hall measurement.
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