Influence of Deposition Angle on Performance of MgO Protective Layer

Yufeng Fan,Xing Xia,Chunliang Liu

DOI: https://doi.org/10.3969/j.issn.1672-7126.2006.03.005

2006-01-01

Abstract:MgO protective layers, grown by electron beam evaporation at different deposition angles on macro-cell discharge screen in ac plasma display panel (AC-PDP), were characterized with X-ray diffraction (XRD) and scanning electron microscopy (SEM). The discharge characteristics of the film were also studied with the macro-cell discharge screen. The results show that the deposition angle strongly affects the quality of MgO protective layers. For example, the film grown at a deposition angle of 15° has the lowest firing voltage, the largest grain sizes and the most pronounced preferred crystal growth orientation.