Study on Preferred Orientation of Mg1-xCaxO Films in Plasma Display Panel

夏星,郭滨刚,范玉锋,刘纯亮
DOI: https://doi.org/10.13922/j.cnki.cjovst.2004.05.005
2004-01-01
Abstract:Mg1-xCaxO dielectric protective films, used in AC plasma display panel (AC-PDP) and grown by electron beam evaporation of MgO and CaO at different substrate temperatures and deposition rates, were studied with X-ray diffraction (XRD) to understand the influence of the CaO content on the preferential growth orientation. The results show that reduction of CaO content significantly affects the preferential growth orientation of MgO<111>. The <111> preferential growth orientation is always observed in both pure MgO and Mg0.96Ca0.04O films grown at all substrate temperature and deposition rates of interest, and the (111) peak of Mg0.93Ga0.07O is found to be the strongest. However, under varied growth conditions, amorphous Mg0.9Ca0.1O films and the (111) and (200) preferential orientations can be obtained, respectively. As compared with that of MgO, for all Mg1-xCaxO films a shift of 0.2 to 0.7 degree can be observed in the position of the 2θ peak, the larger the x, the wider the shift.
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