Zn1-xCdxO Thin Films Prepared by DC Reactive Magnetron Sputtering

马德伟,叶志镇,黄靖云,赵炳辉
DOI: https://doi.org/10.3321/j.issn:0253-4177.2003.10.010
2003-01-01
Abstract:Highly oriented Zn1-xCdxO films on n-Si(111) and glass substrates are obtained by DC reactive magnetron sputtering technique. For x=0.2, the optimal growth temperature is 450°C. For x≤0.6, the Zn1-xCdxO films exhibit the crystal structure, which is similar to the pure ZnO. And a mixing of ZnO (hexagonal) and CdO (cubic) phases is for x=0.8. Transmittance spectrum measurements show that the optical band-edge of Zn1-xCdxO films can be tuned by varying the Cd contents x.
What problem does this paper attempt to address?