Structural and Optical Characterization of Zn1-xCdxO Thin Films Deposited by Dc Reactive Magnetron Sputtering

DW Ma,ZZ Ye,JY Huang,BH Zhao,SK Wan,XH Sun,ZG Wang
DOI: https://doi.org/10.1088/0256-307x/20/6/347
2003-01-01
Chinese Physics Letters
Abstract:Zn1-xCdxO crystal thin films with different compositions were prepared on silicon and sapphire substrates by the dc reactive magnetron sputtering technique. X-ray diffraction measurements show that the Zn1-xCdxO films are of completely (002)-preferred orientation for x less than or equal to 0.6. For x = 0.8, the Elm is a mixture of ZnO hexagonal wurtzite crystals and CdO cubic crystals. For pure CdO, it is highly (200) preferential-oriented. Photoluminescence spectrum measurement shows that the Zn1-xCdxO (x = 0.2) thin film has a redshift of 0.14 eV from that of ZnO reported previously.
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