Influence of Sc2O3 Doping and Film Growth Conditions on MgO Protective Layers

Yufeng Fan,Xing Xia,Chunliang Liu,Jintao Zhang
DOI: https://doi.org/10.3969/j.issn.1672-7126.2007.04.015
2007-01-01
Abstract:The influence of Sc2O3 doping and film growth conditions on MgO protective layers in AC plasma display panel(AC-PDP) was studied.Sc2O3-doped MgO films,grown by electron-beam evaporation under different growth conditions including variations in dopant concentrations,η,in substrate temperatures,T,and in evaporation rates,V,were characterized with scanning electron microscopy(SEM);and the discharge characteristics were studied with macro-cell screens.The results show that Sc2O3-doped MgO protective layers outperform pure MgO protective layers.
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