Abstract:Quantum tunneling electrical probes, consisting of a pair of nanoelectrodes with a gap width of less than 5 nm, can be used as a robust electrical sensing platform for the detection of various nanoscale objects. To achieve this, stable and gap-width-controllable electrodes are essential. Although various methods, including lithography and electrochemical strategies, have been proposed for the fabrication of tunneling electrodes, the ability to precisely control the gap width and ensure reproducibility is still lacking. Here, we report a feedback-controlled electrochemical etching approach to fabricate the tunneling electrodes with a controlled nanogap. The connected nanoelectrodes, derived from a dual-barrel nanopipette, were subjected to a controlled electrochemical etching process from a short-circuited state to a tunneling gap. The resulting tunneling electrodes exhibited solvent-response current-voltage electrical behavior, which was well fitted with the Simons model, indicating the formation of tunneling electrodes. Overall, a success rate of more than 60% could be achieved to obtain the tunneling gaps. Furthermore, to verify the function of tunneling electrodes, we used the etched-tunneling electrodes for free-diffusing protein detection, showing the potential of etched-tunneling electrodes as single-molecule sensors.

Electrochemical Approach for Fabricating Nanogap Electrodes with Well Controllable Separation

Fabrication of A Nano-Scale Gap by Selective Chemical Deposition

Real Time and in Situ Control of the Gap Size of Nanoelectrodes for Molecular Devices

Molecular crystal lithography: a facile and low-cost approach to fabricate nanogap electrodes.

Finely Tuning Metallic Nanogap Size with Electrodeposition by Utilizing High‐Frequency Impedance in Feedback

Fabrication of nanometer-spaced electrodes using gold nanoparticles

Fabrication of Sub-Nanometer Pores on Graphene Membrane for Ion Selective Transport

Fabrication of Sub-10 Nm Gap by Using Electron Beam Lithography

Electrochemical Fabrication of Nanoporous Gold

Electrochemical Etching-Assisted Fabrication of Quantum Tunneling Sensing Probes with Controlled Nanogap Width

Lithography-Independent and Large Scale Fabrication of A Metal Electrode Nanogap

Formation of Nanogaps by Nanoscale Cu Electrodeposition and Dissolution

Fabrication of nanogap metal electrode with sacrificial layer techniques

Sub-5 nm nanogap electrodes towards single-molecular biosensing

Electrochemical Fabrication of Atomically Thin Metallic Wires and Electrodes Separated with Molecular-Scale Gaps

Building Nanogapped Graphene Electrode Arrays by Electroburning.

In-situ control of on-chip angstrom gaps, atomic switches, and molecular junctions by light irradiation

Development of Research on Fabrication of Nanometer-spaced Electrodes

Self-aligned Split Gate Electrodes Fabricated on Suspended Carbon Nanotubes

Precise Fabrication of Uniform Molecular Gaps for Active Nanoscale Devices

Localized electrochemical micromachining with gap control