Development of Research on Fabrication of Nanometer-spaced Electrodes

顾宁,黄岚,徐丽娜,王孟,廖建辉
2003-01-01
Abstract:The main developments of the research in fabrication of nanometer-spaced electrodes abroad and at home are introduced.Especially,a new technology to produce the electrodes by combining the selective chemical deposition with common lithography is described and the following related research subjects are discussed.The Ni double-electrodes with the separation of less than 100 nm have been fabricated by that technology.The technology has some advantages for fabricating the nanometer-spaced electrodes.
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