Effects of Applied Electric Field During Postannealing on the Tunable Properties of (ba,sr)tio3 Thin Films

YD Xia,JB Cheng,B Pan,D Wu,XK Meng,ZG Liu
DOI: https://doi.org/10.1063/1.2006982
IF: 4
2005-01-01
Applied Physics Letters
Abstract:The impact of postannealing in electric field on the structure, tunability, and dielectric behavior of rf magnetron sputtering derived (Ba,Sr)TiO3 films has been studied. It has been demonstrated that postannealing in the proper electric field can increase the dielectric constant and the tunability remarkably and destroy the symmetry of capacitance-voltage characteristics of the films. The increased out-of-plane lattice constant and the appearance of the hysteresis loops in the electric-annealed films indicated the formation of small polar regions with tetragonal structure, which are responsible for the increased dielectric constant and tunability. It was proposed that the segregation of Ti3+ ions caused by electric annealing could induce the formation of BaTiO3-like regions, which are ferroelectric at room temperature.
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