Mechanism of positive-bias temperature instability in sub-1-nm TaN/HfN/HfO2 gate stack with low preexisting traps

N. Sa,J. F. Kang,H. Yang,X. Y. Liu,Y. D. He,R. Q. Han,C. Ren,H. Y. Yu,D. S. H. Chan,D.-L. Kwong
DOI: https://doi.org/10.1109/LED.2005.853683
IF: 4.8157
2005-01-01
IEEE Electron Device Letters
Abstract:In this letter, the positive-bias temperature instability (PBTI) characteristics of a TaN/HfN/HfO/sub 2/ gate stack with an equivalent oxide thickness (EOT) of 0.95 nm and low preexisting traps are studied. The negligible PBTI at room temperature, the so-called "turn-around" phenomenon, and the negative shifts of the threshold voltage (V/sub t/) are observed. A modified reaction-diffusion (R-D) mo...
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