Research Of Electroplating Cu On Pretreatment Ceramic Substrates

Hl Ning,Zt Geng,Js Ma,Fx Huang,Zy Qian,Gh Chen
DOI: https://doi.org/10.3321/j.issn:1002-185x.2004.03.024
2004-01-01
Rare Metal Materials and Engineering
Abstract:Metallization is necessary for some packaging substrates. It is the key of metallization to improve the adhesion strength between copper plate and ceramic substrates. The adhesion between copper plate and ceramic substrates generally should be more than 15 MPa. Electroplated copper on alumina and aluminum nitride substrates has been studied. It is found that the roughening surface of the substrates can improve the adhesion. The technology of depositing copper plate and the testing methods of adhesion are also studied.
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