Progress of Research on the Alumina Ceramics Metallization

MA Yuan-yuan,WANG De-miao,REN Gao-chao
DOI: https://doi.org/10.3969/j.issn.1002-8935.2007.05.011
2007-01-01
Abstract:Recent domestic and international developments of alumina ceramics metallization were reviewed.Several commonly used metallization techniques were introduced.The influence on metallization quality cased by the film material,thickness and technique parameters in vacuum sputtering were analyzed.
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