Abstract:Micro-Electro-Mechanical Systems (MEMS) accelerometers have great potentials for applications in aerospace, autonomous driving and consumer electronics. However, most of their working principles are based on capacitive and resistance types, which cannot be easily used for wireless and passive sensing, while surface acoustic waves (SAWs) are the key solution for this problem. Due to complex acoustic-electric-mechanical coupling during accelerator operations, currently, there needs an accurate, reliable, and efficient design and simulation platform to improve the structure and performance of SAW based accelerometers. In this work, we proposed an accurate, reliable, and efficient modeling platform to optimize designs of SAW accelerometers, using a double-ended cantilever beam structure as an example. This model integrated elastic acoustic effect and the coupled wave equations under both the mechanical and electrical loading using the finite element analysis, and obtained acceleration-frequency responses of the accelerators. We have systematically simulated effects of thickness of piezoelectric film, wavelengths, and structural parameters of cantilever beams, and the simulation results are well consistent with the theoretical results. Finally, using the developed model, we designed a high-G SAW accelerometer (up to 20000 g), which achieved a high sensitivity (-41.8 Hz/g) and excellent linearity (0.9999), and another high sensitivity accelerometer (3.02 KHz/g), with a good linearity (0.9999) over a 100 g acceleration range.

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