Abstract:Silicon photonics has been studied in various areas by providing small-footprint, high-performance, and mass-producible optoelectronic components integrated on a chip. For the photonic packaging, ultraviolet (UV) curing techniques have been widely utilized. Meanwhile, silica cladding absorption to UV light could alter its refractive index (RI), affecting the optical testing of silicon devices during or after the device packaging. Therefore, it is significant to characterize the dynamics of RI changes induced by UV-light irradiation. However, the in-situ characterization of such devices is seldom explored. Here, we studied the influence of UV-light irradiation on silicon photonic devices by probing resonant wavelength shifts of a racetrack microring resonator. Specifically, we studied the temporary variation of the resonant wavelength and its recovery time under different UV-light exposure durations. Experimental results show that with a UV energy of 21 J/cm 2 , the resonator had a maximum resonant wavelength shift of 0.31 nm, corresponding to an effective RI change of 0.0009 and recovering time of 95 minutes. Based on the experimental results, we compressively analyzed and compared RI changes induced by plasmon dispersion effect, thermal optical effect and photon-induced silica densification effect. Our study is expected to provide useful guidelines for in-situ silicon photonic testing and packaging.

A Laboratory Study of Photothermal Excited Silicon Microresonators with Coated Film

The Optical Excitation of Silicon Microresonator

Resonant Mechanism of Bi-Layered Silicon Micro-Resonators under Optical Excitation

Discussion on the optical-coupling in silicon optical-type micromechanical sensors

Thermally Excited Micromechanical Vacuum Resonator

The Research on Optically Excited Silicon Resonators

Thermal conductivity measurement of submicrometer-scale silicon dioxide films by an extended micro-Raman method

Measurement of the Thermal Transport Properties of Dielectric Thin Films Using the Micro-Raman Method

New progress in optically excited and interrogated micromachined silicon resonant sensor

Research of optically excited and interrogated silicon resonators

Micro-ring Resonator Optical Sensor Based on Silicon and Silicon Nitride Waveguide

Experimental Investigation of Waveguide Sensor Based on Cascaded-Microring Resonators with Vernier Effect

Photo-thermo-optical modulation of Raman scattering from Mie-resonant silicon nanostructures

Experimental Demonstration of Thermally Tunable Fano and EIT Resonances in Coupled Resonant System on SOI Platform

Research On Thermal Conductivity Measurement Of Submicrometer-Scale Silicon Dioxide Film In Thermal Flow Sensor By Micro-Raman Technique

Photothermal Switching Based on Silicon Mach–Zehnder Interferometer Integrated with Light Absorber

In-Situ Study of Dynamics of Refractive Index Changes in Silicon Devices Induced by UV-light Irradiation

Photothermal Elastic Vibration Spectra of SiO2 Film on Si

Liquid-Modulated Photothermal Phenomena in Porous Silicon Nanostructures Studied by μ-Raman Spectroscopy

Sub-wavelength Temperature Probing in Near-Field Laser Heating by Particles.

Stimulated Raman Scattering In Silicon Photonic Crystal Waveguides Under Continuous Excitation