Modification for ceramic surfaces by ion implantation-assisted multi-arc ion plating technique

Zhijian Peng,Hezhuo Miao,Wenjie Si,Longhao Qi,Jianghong Gong,Wenzhi Li
2002-01-01
Rare Metal Materials and Engineering
Abstract:A technique called ion implantation-assisted multi-arc ion plating was proposed. Using such technique the surfaces of hot-pressed silicon nitride and composite silicon nitride ceramics were modified. It is showed that the coatings (Ti,Al)N, (Ti,Zr)N and (Ti,Cr)N prepared-by this technique are possessed of high-performance and good adhesion to the ceramic substrates. The maximal critical load in the nanoscratch tests is more than 60mN. The maximal nanohardness under dynamic load is more than 40GPa. The coatings are possessed of excellent performances in cutting applications. This technique might be promising for the surface modification of structural ceramics.
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