Study on comparision of the mechanical properties of ceramics after ion implantation

Hezhuo Miao,Zhijian Peng,Wenjie Si,Longhao Qi,Dapeng Liu,Jianghong Gong
2002-01-01
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
Abstract:Hot-pressed silicon nitride and composite silicon nitride ceramics, pressureless-sintered yttria stabilized zirconia ceramics, and HIPed (hot isostatic pressed) high-purity alumina ceramics were modified by ion implantation in a MEVVA (Metal Vapor Vacuum Arc) implanter. The samples were implanted by Ti ions with nominal doses 5×1016 to 1×1018 Ti ions/cm2 under ambient temperature. The effects of titanium implantation and the ion dose implanted on the microstructures and mechanical properties of the ceramics were studied through the characterization of the Rutherford backscattering spectroscopy (RBS), X-ray diffraction (XRD), scanning electron microscopy (SEM), Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS) and nanoindentation test before and after implantation. It is found that the nanohardness of the oxide ceramics increase first and then decrease; with the increase of the doses of the implanted titanium ions on one hand, on the other hand, the nanohardness of the silicon nitride ceramics increase with the increase of the doses implanted. The factors of influence on the mechanical properties of the ceramics are considered and discussed. It could be deduced that: (1) the improvement of the ceramic surface states conduces the increase of nanohardness and Young's modulus; (2) the radiation-hardening mechanism leades to the increase of nanohardness; (3) the amorphization of the ceramics result in the decrease of nanohardness and Young's modulus; (4) the production of hard phase in the ceramic sub-surfaces induce the increase of nanohardness, and the production of soft one in the sub-surfaces causes decrease of nanohardness.
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