Abstract:This study utilized ion implantation to modify the material properties of silicon carbide (SiC) to mitigate subsurface damage during SiC machining. The paper analyzed the mechanism of hydrogen ion implantation on the machining performance of SiC at the atomic scale. A molecular dynamics model of nanoscale cutting of an ion-implanted SiC workpiece using a non-rigid regular tetrakaidecahedral diamond abrasive grain was established. The study investigated the effects of ion implantation on crystal structure phase transformation, dislocation nucleation, and defect structure evolution. Results showed ion implantation modification decreased the extension depth of amorphous structures in the subsurface layer, thereby enhancing the surface and subsurface integrity of the SiC workpiece. Additionally, dislocation extension length and volume within the lattice structure were lower in the ion-implanted workpiece compared to non-implanted ones. Phase transformation, compressive pressure, and cutting stress of the lattice in the shear region per unit volume were lower in the ion-implanted workpiece than the non-implanted one. Taking the diamond abrasive grain as the research subject, the mechanism of grain wear under ion implantation was explored. Grain expansion, compression, and atomic volumetric strain wear rate were higher in the non-implanted workpiece versus implanted ones. Under shear extrusion of the SiC workpiece, dangling bonds of atoms in the diamond grain were unstable, resulting in graphitization of the diamond structure at elevated temperatures. This study established a solid theoretical and practical foundation for realizing non-destructive machining at the atomic scale, encompassing both theoretical principles and practical applications.

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Flexural Strength Change of Silicon Nitride Implanted by High Dose Titanium Ions

Mechanical Properties and Microstructures of Sintered Zirconia Ceramics Implanted by Titanium Ions with MEVVA Sources

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Bending Strength of Ceramics Implanted by Titanium, Zirconium and Chromium Ions with MEVVA Source

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Tribological performance of Ti-6Al-4V plasma-based ion implanted with nitrogen

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Study on the preparation of hard and wear-resistant titanium nitride films on silicon nitride ceramic cutting tools

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Modification for ceramic surfaces by ion implantation-assisted multi-arc ion plating technique

Effects of Single- and Dual-Element Ion Implantation on Tribomechanical Properties of Cronidur 30 Bearing Steel

Nitrogen Ion Implantation on the Mechanical Properties of Aisi 420 Martensitic Stainless Steel

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Improvement of Tribological Behavior of a Ti–Al–Zr Alloy by Nitrogen Ion Implantation

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