Abstract:Rescheduling plays an important role to improve operational performance of a semiconductor wafer Fabrication facility due to its high uncertainty. Based oil the summarization oil the state-of-the-art rescheduling technology, a kind of rescheduling framework for semiconductor manufacturing is constructed. It consists of four parts: rescheduling stimulated factors, rescheduling strategy, rescheduling method and rescheduling performance evaluation. The rescheduling stimulated factors are divided into four types, i.e. changes from external environment, changes from production environment, changes from production process and changes of operational performance, which could be further classified as factors resulting in ineffectiveness of existing operational plan, factors impacting existing operational plan partly, factors impacting existing operational plan fully, and factors impacting existing operational plan uncertainly. Accordingly, rescheduling strategy is presented. For the former three types, the rescheduling process is Unambiguous to happen. And the rescheduling type is certain, i.e. regenerating rescheduling, partly modified rescheduling and fully modified rescheduling. For the fourth factors, the rescheduling strategy must consider the change degree of performance issues. Furthermore, swarm intelligence based semiconductor manufacturing rescheduling model for fully modified rescheduling method is proposed. Finally, the shortterm performance issues system for evaluating rescheduling impacts oil semiconductor manufacturing is established.

Research of Control and Scheduling on Semiconductor Manufacturing Line

Research Progress of Modeling Methods and Scheduling Strategies for Semiconductor Wafer Fabrication

Modeling And Real-Time Scheduling Of Semiconductor Manufacturing Line Based On Simulation

Research development of R2R control methods for semiconductor manufacturing process

Research On Rescheduling For A Semiconductor Wafer Fabrication Facility

The New Method of Dynamic Scheduling in Semiconductor Fabrication Line

The integrated scheduling simulator for IC manufacturing line

Investigation on Semiconductor Test Scheduling

Scheduling Platform of Semiconductor Assembly and Test Producing Line

Research on Petri Net Based Hierarchical Scheduling Structure for Semiconductor Manufacture Process

Dynamic Reentrant Scheduling Simulation for Assembly and Test Production Line in Semiconductor Industry

Data-based scheduling of complex manufacturing systems

Survey of Production Scheduling in the Process Industry

An On-Line Scheduler for Semiconductor Fabrications

Research on production planning and scheduling for semi-process indus-try

Satisfactory scheduling for semiconductor manufacturing line based on multi-object

Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system

Capacity Planning in Semiconductor Manufacturing

Applications of intelligent scheduling rules in semiconductor fabrication

A Decentralised Multi-Objective Scheduling Methodology For Semiconductor Manufacturing

Research on Preventive Maintenance Scheduling Model for Multi-Products and Semi-Flexible Parallel Production Line