Capacity Planning in Semiconductor Manufacturing

李琦,刘大成,郑力,张涛
DOI: https://doi.org/10.3969/j.issn.1003-353x.2004.07.010
2004-01-01
Abstract:Capacity planning in semiconductor manufacturing is very complex due tonumerous variables/constraints and competing objectives. This paper describes key methodolo-gies employed to solve the difficult problems, and we focus on the most convincing approach,mathematical programming, especially Linear Programming (LP). We introduce LP modeling andalgorithm developing techniques, and also address the evaluation system of capacity planning.
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