An On-Line Scheduler for Semiconductor Fabrications

W Ran,W Cheng
DOI: https://doi.org/10.1109/icsmc.1996.569773
1996-01-01
Abstract:As is well known, semiconductor fabrication is very complex. The complexity is caused by the competitive use of the same machines by the same types of products at their different stages of manufacturing life and random rework and scrapped. It is a hard problem in fab management. In this paper, we use an on-line scheduler to give a practical schedule that can respond to “burst” states of the fab and give good performances. The simulation results of an aggregated model show that this method is effective
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