Prognostics for Semiconductor Sustainability: Tool Failure Behavior Prediction in Fabrication Processes
Li Zhu,Junghui Chen,Chun-I Chen
DOI: https://doi.org/10.1109/tsmc.2024.3359851
2024-01-01
IEEE Transactions on Systems, Man, and Cybernetics: Systems
Abstract:Semiconductor fabrication is regarded as one of the most complicated production processes with a high-mixed and uncertain production context, and it suffers from tool failures. Prognostics can predict the time when a process tool cannot perform its intended function. Therefore, preventive maintenance can be planned in time with the minimum impact on the production lines. Because most of the tool faults cannot be owed to the failure of a single component, it is challenging to model the system directly through mechanism analysis. Therefore, the development of failure prognostics in semiconductor manufacturing is somewhat impeded. Data-driven approaches are appropriate in this case, especially when the domain knowledge of the system under study is not comprehensive enough. This article attempts to propose a novel data-driven prognostic method integrated with the auto-associative regression and the Gaussian process to address the issue. This proposed method can extract the failure factors, establish the prognostic model and present the reliability of the model. On the basis of the built prognostic model, the failure tendency is predicted and the maintenance schedule can be determined. The validity and feasibility of the proposed method are demonstrated through a numerical example and a practical semiconductor manufacturing process, respectively. The proposed prognostic scheme can guide the frequency plan of preventive maintenance in the fabrication process and improve the productivity in semiconductor manufacturing.
automation & control systems,computer science, cybernetics