Research On Rescheduling For A Semiconductor Wafer Fabrication Facility

F Qiao,L Li,Qd Wu
2005-01-01
Abstract:Rescheduling plays an important role to improve operational performance of a semiconductor wafer Fabrication facility due to its high uncertainty. Based oil the summarization oil the state-of-the-art rescheduling technology, a kind of rescheduling framework for semiconductor manufacturing is constructed. It consists of four parts: rescheduling stimulated factors, rescheduling strategy, rescheduling method and rescheduling performance evaluation. The rescheduling stimulated factors are divided into four types, i.e. changes from external environment, changes from production environment, changes from production process and changes of operational performance, which could be further classified as factors resulting in ineffectiveness of existing operational plan, factors impacting existing operational plan partly, factors impacting existing operational plan fully, and factors impacting existing operational plan uncertainly. Accordingly, rescheduling strategy is presented. For the former three types, the rescheduling process is Unambiguous to happen. And the rescheduling type is certain, i.e. regenerating rescheduling, partly modified rescheduling and fully modified rescheduling. For the fourth factors, the rescheduling strategy must consider the change degree of performance issues. Furthermore, swarm intelligence based semiconductor manufacturing rescheduling model for fully modified rescheduling method is proposed. Finally, the shortterm performance issues system for evaluating rescheduling impacts oil semiconductor manufacturing is established.
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