Comparison of As-Grown and Annealed GaN/InGaN : Mg Samples
Qingwen Deng,Xiaoliang Wang,Hongling Xiao,Cuimei Wang,Haibo Yin,Hong Chen,Defeng Lin,Lijuan Jiang,Chun Feng,Jinmin Li,Zhanguo Wang,Xun Hou
DOI: https://doi.org/10.1088/0022-3727/44/34/345101
2011-01-01
Abstract:Mg-doped InGaN was grown on unintentionally doped GaN layer, and Mg and defect behaviours in both GaN and InGaN : Mg were investigated through photoluminescence measurement at 7 K. Mg acceptor was found in unintentionally doped GaN after thermal annealing in N2 ambient, and Mg activation energy was estimated to be 200 meV and 110 meV for GaN and InGaN, respectively. Particularly, the ultraviolet band (3.0–3.2 eV) in the GaN layer was infrequently observed in the unannealed sample but quenched in the annealed sample; this band may be associated with oxygen-substituted nitrogen defects. Moreover, the measurement errors of photoluminescence and x-ray diffraction originated from strain were taken into account.