Study on switching times of RF/Microwave MEMS shunt switches

Yongfu Long,Ziqiang Zhu,Zongsheng Lai,Fangmin Guo,YanLing Shi

2002-01-01

Tien Tzu Hsueh Pao/Acta Electronica Sinica

Abstract:This paper presents the modeling and numeric calculations of a radio frequency (RF)/microwave MEMS shunt switch. The movement behavior of the movable membrane is taken as a single directional damped oscillation under an electrostatic force, an elastic recovery force and a drag force in the air. A set of mathematic formula and calculated results are given for a typical MEMS shunt switch. The calculated switching times for typical MEMS shunt switches are about 1-40 μs, depending on the thickness of the membrane, constitutive materials and structure parameters. The obtained results are well agreed with the reported experimental ones in reference[4]. Finally, the limitations about the modeling and numerical calculations are discussed.