Polarity Dependence of Hexagonal Gan Films on Two Opposite C Faces of Al2o3 Substrate

PD Han,ZG Wang,XF Duan,Z Zhang
DOI: https://doi.org/10.1063/1.1380731
IF: 4
2001-01-01
Applied Physics Letters
Abstract:GaN films were grown in pairs on two opposite c faces of Al2O3 substrate by low-pressure metal-organic vapor phase epitaxy, and studied by scanning electron microscopy and converged beam electron diffraction. It is found that GaN film on the c-Al2O3 whose c face is forward to its crystal seed has [0001] polarity, and the other film on the c-Al2O3 whose c face is backward to its crystal seed has [0001̄] polarity.
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