The Selection and Creation of the Rules in Rules-Based Optical Proximity Correction

R Shi,Y Cai,XL Hong,WM Wu,CQ Yang
DOI: https://doi.org/10.1109/icasic.2001.982496
2001-01-01
Abstract:Considering the efficiency and veracity of rules-based OPC applied to recent large-scale layout, we firstly point out the importance of the selection and creation of rules in rules-based OPC. Our discussion addresses the crucial factors in selecting and creating rules as well as how we select and create more concise and practical rules-base. Based on our ideas we suggest four primary rules and as a result we show some rule data in table. The automatic construction of the rules-base called OPCL is an important part of the whole rules-based OPC software.
What problem does this paper attempt to address?